CNC Machining for Semiconductor Equipment Parts

Send one drawing and the spec that actually matters. We pass it to up to 3 machine shops that already run this class of part, and you hear back within 24 business hours.

Send my RFQ Check my part

The pressure the part sees decides the material, the finish and the packing long before it decides the tolerance.

Free for buyersShops pay for matched requests, you pay nothing.

Max 3 shopsOne RFQ, a short list, not an auction.

NDA on requestFiles stay with us until it is signed.

24 business hoursFirst reply, even when the answer is no.

Why buyers send semiconductor part work here

It comes down to the match: shops that fit your part, from the first quote.

Matched by specialization
Your RFQ goes to up to 3 shops that already run this class of part, picked for your part class, material and vacuum spec. Not a general directory.
Professional suppliers
Shops in the network quote to your drawing, communicate clearly and keep you updated while your parts are made.
You deal with the shop
Quotes, terms and delivery are agreed between you and the shop. Free for buyers.

The parts we route

One niche, four families. If your part is not on this list, say so in the RFQ and we will tell you plainly whether we can match it.

Chamber and lid components

Large aluminum and stainless bodies where flatness, sealing faces and interior finish decide whether the chamber holds.

Chamber bodies and lids
Liners and shields
Showerhead blanks
Pedestal and heater bodies

Wafer handling

Thin, light parts where flatness, balance and particle behaviour matter more than raw tolerance.

End effectors and blades
Transfer arms and links
Wafer chucks and rings
Aligner and lift pin parts

Gas delivery and vacuum

Small, wetted parts where interior surface finish, cleanliness and leak integrity are the whole job.

Manifold blocks
CF and KF flange bodies
Feedthrough and adapter bodies
Valve and fitting bodies

Frames, jigs and test fixtures

Structural and tooling work with no vacuum spec, where flatness, parallelism and repeatability set the price.

Machine frames and weldments
EFEM and load port brackets
Test and burn-in fixtures
Assembly and handling jigs

Does your part need a semiconductor shop?

Tick what applies. Nothing is sent anywhere, the answer appears below.

The part sees vacuumIt is pumped below 10-3 Torr in service, or it seals a volume that is.
Material certs are requiredMill cert, heat lot traceability or a restricted material list on the drawing.
Ra 0.4 um or better on a faceUsually a sealing face, a wafer contact face or an interior wetted surface.
A cleanliness spec is on the drawingParticle count, wipe test, no silicone, or a named cleaning procedure.
Hard anodize or electropolish is called outType III anodize, electropolish, passivation, or a coating done by a qualified line.
Packing is specifiedDouble bag, cleanroom bag, nitrogen purge, or a fab specific packing standard.

Tick the boxes that apply

Most of these rules cost money on every piece, so the shop that quotes should already be used to them.

Send my RFQ

Vacuum grade work is a different job

A shop can hold your tolerance and still send back a part the fab will not accept. The gap is rarely the machining.

General precision

Stock bought to grade
Deburr, wash, wrap
Finish quoted per drawing note
Inspection report on request
Boxed with the usual packing

Vacuum grade

Mill cert and heat lot kept with the part
Clean handling area, no silicone, controlled media
Finishing line qualified for the coating called out
Dimensional report as a deliverable, not a favour
Precision clean, double bag, labelled outside the bag

Spindle milling a round aluminum part, the usual first operation on a semiconductor chamber component

Ask a shop which of the five points on the right it does in house and which it buys. The answer tells you more than a capability list.

Materials and typical ranges

Typical is the word that matters. These are the ranges shops usually work in, not a promise on your part.

Material	Typical tolerance	Typical Ra	Usual finish	Where it is used
Aluminum 6061-T6	±0.01 to ±0.025 mm	0.4 to 0.8 um	Type III hard anodize, Type II anodize, bead blast	Chamber bodies, lids, brackets, most structural parts
Aluminum 5052 / 5083	±0.025 mm	0.8 to 1.6 um	Anodize, bead blast	Sheet and weldment work, covers, ducting
Stainless 316L	±0.01 to ±0.025 mm	0.2 to 0.4 um	Electropolish, passivation	Wetted gas paths, flanges, UHV hardware
Stainless 304L	±0.025 mm	0.4 to 0.8 um	Passivation, bead blast	Frames, non wetted vacuum structure
Titanium Gr 2 / Gr 5	±0.01 to ±0.025 mm	0.4 to 0.8 um	Anodize, passivation	Corrosive process areas, light structural parts
PEEK	±0.05 mm	0.8 to 1.6 um	As machined, precision clean	Insulators, wafer contact parts, low outgassing needs
Vespel SP-1	±0.05 mm	0.8 to 1.6 um	As machined	High temperature insulators, wear parts
Alumina 99.5	±0.05 mm as fired	Ground to spec	Lapping, grinding	Insulators and wafer contact parts, usually a ceramic house

Tolerance and Ra apply to the feature that needs them, not to the whole part. Putting one number in the title block is the fastest way to a price nobody wanted. Grades with UNS, EN and JIS designations are on the materials page.

Finishing and cleanliness

These steps happen after the last cut and they carry most of the schedule risk.

Type III hard anodizeThick, hard aluminum oxide for plasma facing and wear surfaces. Grows the part, so the drawing has to say whether the tolerance is before or after coating.
Type II sulfuric anodizeThinner and cheaper. Used where the surface needs corrosion resistance but not plasma resistance.
ElectropolishRemoves the smeared machining layer from stainless and lowers interior Ra. Standard on wetted gas path parts and UHV hardware.
PassivationChemical removal of free iron from stainless. Cheap, quick, often specified together with electropolish.
Bead blastA uniform matte surface that holds coatings and hides tool marks. The bead media itself becomes a cleanliness question.
Precision clean and double bagUltrasonic or DI rinse, dry, then bag inside a bag in a clean area. This is where a cheap quote and a usable part diverge.

The whole route from stock to a bagged part, step by step: processes.

Process areas we see RFQs from

The part family matters more than the tool it ends up in, but the tool tells the shop what to expect.

Deposition

CVD, PVD and ALD. Chamber bodies, liners, showerhead blanks, heater parts.

Etch

Plasma facing aluminum with hard anodize or a sprayed coating, plus quartz and ceramic adjacent hardware.

CMP

Carriers, retaining hardware, slurry wetted manifolds and fittings.

Ion implant

Beam line hardware, graphite adjacent mounts, high vacuum structure.

Metrology and inspection

Stages, optical and sensor mounts, stiff low mass brackets.

EFEM and wafer handling

End effectors, arms, load port and aligner parts, frames.

Test and burn-in

Change kits, sockets adjacent hardware, thermal plates, fixtures.

Assembly and packaging

Bonding and handling jigs, carriers, trays, tooling plates.

Usual materials, finishes and acceptance points per module: applications.

How it works

Three steps, and the third one does not involve us.

You send the drawing
Model, drawing, quantity, the finish and cleanliness callouts, and the supplier region you want. An NDA first if you need one.
We screen and match
We check the RFQ is complete, then offer it to up to 3 shops whose machines, materials and finishing chain fit the part. Shops see a preview with no name and no files.
The shop quotes you directly
You compare quotes, ask your own questions and order from the shop you pick. We take no commission on that order.

What drives the price

Worth reading before you tighten a number on the drawing.

Material and cert levelA 6061 plate with a mill cert and a 316L bar with heat lot traceability are different purchases. Restricted material lists narrow the shops that can buy the stock at all.
Tolerance and geometryLarge flat sealing faces, deep pockets and thin walls drive fixturing and stress relief cycles. A tolerance one step tighter than the function needs is paid for on every piece.
Surface finishRa 0.8 um comes off the cutter. Ra 0.4 um and better means a finishing pass, slower feeds and inspection, and it applies only where the drawing says so.
Finishing chainAnodize, electropolish and passivation are outside processes. Each one adds days, a transport leg and a risk of rework if the masking is wrong.
Cleanliness and packingPrecision clean, cleanroom bagging and nitrogen purge are line items, not courtesies. Ask for them on the drawing or expect the cheaper method.
Quantity and repeatProgramming and fixtures are paid once. On 1 to 5 pieces they are most of the price, and a stated repeat expectation usually lowers the first order too.

Send a quick RFQ

Four fields and a file. If you would rather fill in the full form with material, tolerance, finish and region, use the full RFQ page.

Prefer email? Write to and attach the drawing.

Run these parts already?

We sell each screened RFQ as a lead to machine shops that fit the part. You buy the lead, quote the buyer directly and keep the whole order. We take no commission on what you win.

Registering costs nothing and does not commit you to buying anything.

You see a preview firstPart family, material, envelope, quantity, tolerance, region and deadline. No buyer name, no files.
Short list, not an auctionAt most 3 shops get the same RFQ.
Direct relationshipYou quote the buyer, you invoice the buyer, you keep the customer.

Supply the shops that run these parts?

Vacuum grade material, cutting tools and workholding, surface treatment and coating, precision cleaning and cleanroom packaging, metrology and leak or outgassing testing. Tell us what you sell and we introduce you to shops that need it.

Introductions are free. Nobody pays to be named in a guide.

Tell us what you supply

Introduction, not a listWe do not sell contact lists. One vendor and one shop at a time, and only when the shop agrees.
Named only where it fitsA vendor appears in a guide when it supports a technical point, never as paid placement.

Questions buyers ask

Do you machine the parts yourselves?

No. We are a matching service, not a machine shop. We own no machines and quote no parts. The shops that reply to you run the machines, and you place the order with them.

Is this free for buyers?

Yes. Sending an RFQ and receiving quotes costs you nothing. Machine shops pay us for a matched request. Price, lead time and terms are agreed between you and the shop.

Who sees my drawing?

Shops first see a preview with part family, material, size envelope, quantity, tolerance and deadline. The preview carries no name, no company and no files. Your contact details and files go only to the shops we match, up to 3. If you ask for an NDA, the files stay with us until it is signed.

How do you decide which shops get my RFQ?

Two filters. First the part family and the spec on the drawing, so a shop that has never held Ra 0.4 um on a sealing face does not see a sealing part. Second the supplier region you pick on the form.

Can you handle parts under an existing qualification or a fab spec?

Send the spec with the drawing. If the part is tied to a qualification, a named cleaning procedure or a fab specific packing standard, say so in the description. Shops that cannot meet it are better off not quoting.

Which files should I send?

A STEP or IGES model plus a PDF drawing with tolerances, surface finish callouts, material and temper, and any cleanliness or packing note. DWG and DXF also work. A model without a drawing usually comes back with questions instead of a price.

Guides

Specs, cost drivers and supplier questions, written for the person holding the drawing.

All guides